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Volumn 16, Issue 11, 2001, Pages 3188-3201

Thermal stability of carbon nitride thin films

(10) Hellgren, Niklas a Lin, Nian a Broitman, Esteban a Serin, Virginie b Grillo, Stefano E b Twesten, Ray c Petrov, Ivan c Colliex, Christian d Hultman, Lars a Sundgren, Jan Eric a

a LINKÖPING UNIVERSITY (Sweden)

b Centre de la Recherche Scientifique (France)

c University of Illinois at Urbana Champaign (United States)

d UNIVERSITÉ PARIS SUD (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CARBON NITRIDE; CRYSTALLINE MATERIALS; ELECTRON ENERGY LOSS SPECTROSCOPY; FILM GROWTH; GRAPHITIZATION; MAGNETRON SPUTTERING; MICROSTRUCTURE; RAMAN SCATTERING; THERMODYNAMIC STABILITY; X RAY PHOTOELECTRON SPECTROSCOPY;

CRYSTALLINE FILMS;

THIN FILMS;

EID: 0035521916 PISSN: 08842914 EISSN: None Source Type: Journal
DOI: 10.1557/JMR.2001.0440 Document Type: Article

Times cited : (51)

References (35)

1
- 0032685577
- (1999) Diamond Relat. Mater. , vol.8 , pp. 1906
- Chen, G.L.¹ Li, Y.² Lin, J.³ Huan, C.H.A.⁴ Guo, Y.P.⁵

2
- 0002911175
- (1999) Chem. Phys. Lett. , vol.306 , pp. 53
- Lim, S.F.¹ Wee, A.T.S.² Lin, J.³ Chua, D.H.C.⁴ Huan, C.H.A.⁵

3
- 0000362746
- (1999) Chem. Phys. Lett. , vol.310 , pp. 240
- Xiao, X.C.¹ Jiang, W.H.² Song, L.X.³ Tian, J.F.⁴ Hu, X.F.⁵

4
- 0034273468
- (2000) Diamond Relat. Mater. , vol.9 , pp. 1782
- Xiao, X.C.¹ Jiang, W.H.² Song, L.X.³ Tian, J.F.⁴ Huv, X.F.⁵

5
- 0001241335
- (1995) Phys. Rev. Lett. , vol.75 , pp. 1335
- Sjöström, H.¹ Stafström, S.² Boman, M.³ Sundgren, J.-E.⁴

6
- 0030538517
- (1996) J. Vac. Sci. Technol. A , vol.14 , pp. 56
- Sjöström, H.¹ Hultman, L.² Sundgren, J.-E.³ Hainsworth, S.V.⁴ Page, T.F.⁵ Theunissen, G.S.A.M.⁶

7
- 0343215213
- (1999) Phys. Rev. B , vol.59 , pp. 5162
- Hellgren, N.¹ Johansson, M.P.² Broitman, E.³ Hultman, L.⁴ Sundgren, J.-E.⁵

8
- 0035249137
- (2001) Ear. Phys. J. Appl. Phys. , vol.13 , pp. 97
- Grillo, S.E.¹ Hellgren, N.² Serin, V.³ Broitman, E.⁴ Colliex, C.⁵ Hultman, L.⁶ Kihn, Y.⁷

9
- 0003394101
- Plenum Press, New York
- (1986) Electron Energy-Loss Spectroscopy in the Electron Microscope 2nd ed.
- Egerton, R.F.¹

10
- 85083132416
- Ph.D. Thesis, No. 420, Linköping University, Linköping, Sweden
- (1996)
- Owman, F.¹

11
- 0000555960
- (2000) Phys. Rev. B , vol.61 , pp. 4898
- Lin, N.¹ Hellgren, N.² Johansson, M.P.³ Hultman, L.⁴ Erlandsson, R.⁵ Sundgren, J.-E.⁶

12
- 33744538097
- (1972) Phys. Rev. B , vol.5 , pp. 4709
- Shirley, D.A.¹

13
- 0019622512
- (1981) Surf. Interface Anal. , vol.3 , pp. 211
- Wagner, C.D.¹ Davis, L.E.² Zeller, M.V.³ Taylor, J.A.⁴ Raymond, R.M.⁵ Gale, L.H.⁶

14
- 0034833149
- (2001) Thin Solid Films , vol.382 , pp. 146
- Hellgren, N.¹ Johansson, M.P.² Broitman, E.³ Sandstrtöm, P.⁴ Hultman, L.⁵ Sundgren, J.-E.⁶

15
- 0032630407
- (1999) Diamond Relat. Mater. , vol.8 , pp. 993
- Prioli, R.¹ Zanette, S.I.² Caride, A.O.³ Lacerda, M.M.⁴ Freire, F.L.⁵

16
- 0034516522
- (2000) Thin Solid Films , vol.377-378 , pp. 148
- Kulisch, W.¹ Popov, C.² Zambov, L.³ Buliř, J.⁴ Delplancke-Ogletree, M.P.⁵ Lančok, J.⁶ Jilínek, M.⁷

17
- 0033905258
- (2000) Diamond. Relat. Mater. , vol.9 , pp. 212
- Fernández-Ramos, C.¹ Sayagués, M.J.² Rojas, T.C.³ Alcalá, M.D.⁴ Real, C.⁵ Fernández, A.⁶

18
- 0042765342
- (1998) Carbon , vol.36 , pp. 781
- Soto, R.¹ González, P.² Lusquiños, F.³ Pou, J.⁴ León, B.⁵ Pérez-Amor, M.⁶

19
- 0034276292
- (2000) J. Vac. Sci. Technol. A , vol.18 , pp. 2349
- Hellgren, N.¹ Johansson, M.P.² Hjörvarsson, B.³ Broitman, E.⁴ Östblom, M.⁵ Liedberg, B.⁶ Hultman, L.⁷ Sundgren, J.-E.⁸

20
- 0003998388
- CRC Press, Boca Raton, FL
- (2000) Handbook of Chemistry and Physics, 81st ed. , pp. 526-532

21
- 0002924710
- (1997) J. Electron Spectrosc. Relat. Phenom. , vol.87 , pp. 45
- Zheng, W.T.¹ Xing, K.Z.² Hellgren, N.³ Lögdlund, M.⁴ Johansson, Å.⁵ Gelius, U.⁶ Salaneck, W.R.⁷ Sundgren, J.-E.⁸

22
- 0000425478
- (1998) Phys. Rev. B , vol.58 , pp. 2207
- Ronning, C.¹ Feldermann, H.² Merk, R.³ Hofsäss, H.⁴ Reinke, P.⁵ Thiele, J.-U.⁶

23
- 4243856801
- (1998) Phys. Rev. B , vol.57 , pp. 2536
- Souto, S.¹ Pickholz, M.² Dos Santos, M.C.³ Alvarez, F.⁴

24
- 0000966540
- (1999) J. Chem. Phys. , vol.111 , pp. 3203
- Johansson, Å.¹ Stafström, S.²

25
- 0001604115
- (1999) Phys. Rev. B , vol.60 , pp. 10855
- Snis, A.¹ Matar, S.F.²

26
- 85083128810
- (2001) NIST X-ray Photoelectron Spectroscopy Database Version 3.0 (Web Version)

27
- 0000328785
- (1999) J. Chem. Phys. , vol.111 , pp. 9678
- Snis, A.¹ Matar, S.F.² Plashkevyeh, O.³ Ågren, H.⁴

28
- 0003330728
- (2000) Phys. Script. , vol.63 , pp. 70
- Plashkevych, O.¹ Snis, A.² Yang, L.³ Ågren, H.⁴ Matar, S.F.⁵

29
- 0001060792
- (2000) Phys, Rev. B , vol.60 , pp. R3705
- Ripalda, J.M.¹ Román, E.² Díaz, N.³ Galán, L.⁴ Montero, I.⁵ Comelli, G.⁶ Baraldi, A.⁷ Lizzit, S.⁸ Goldoni, A.⁹ Paulucci, G.¹⁰

30
- 0000599777
- (1995) Science , vol.269 , pp. 1554
- Hummelen, J.C.¹ Knight, B.² Pavlovich, J.³ Gonzalez, R.⁴ Wudl, F.⁵

31
- 0031548121
- (1997) Phys. Rev. Lett. , vol.78 , pp. 4249
- Pichler, T.¹ Knupfer, M.² Golden, M.S.³ Haffner, S.⁴ Freiedlein, R.⁵ Fink, J.⁶ Andreoni, W.⁷ Curioni, A.⁸ Keshavarz-K, M.⁹ Bellavia-Lund, C.¹⁰ Sastre, A.¹¹ Hummelen, J.-C.¹² Wudl, F.¹³

32
- 85083141993
- (2001) Corex database
- Hitchcock, A.P.¹

33
- 0000673236
- Thin Films: Stresses and Mechanical Properties VI, edited by W.W. Gerberich, H. Gao, J.-E. Sundgren, and S.P. Baker, Pittsburgh, PA
- (1997) Mater. Res. Soc. Symp. Proc. , vol.436 , pp. 275
- Hainsworth, S.V.¹ Sjöström, H.² Page, T.F.³ Sundgren, J.-E.⁴

34
- 0035971767
- (2001) Appl. Phys. Lett. , vol.785 , pp. 2703
- Hellgren, N.¹ Johansson, M.P.² Broitman, E.³ Hultman, L.⁴ Sundgren, J.-E.⁵

35
- 0030733618
- (1997) Int. J. Ref. Met. Hard Mater. , vol.15 , pp. 3
- Badzian, A.¹ Badzian, T.²

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