메뉴 건너뛰기




Volumn 54, Issue 1, 2007, Pages 59-67

CMOS device and circuit degradations subject to HfO2 gate breakdown and transient charge-trapping effect

Author keywords

CMOS oscillators; Dielectric breakdown (BD); Fast transient charge effect; Leakage current; Low noise amplifier (LNA); Reliability

Indexed keywords

AMPLIFIERS (ELECTRONIC); ELECTRIC BREAKDOWN; ELECTRIC INVERTERS; ELECTRIC POTENTIAL; HAFNIUM COMPOUNDS; LEAKAGE CURRENTS; MOSFET DEVICES; OSCILLATORS (ELECTRONIC); TRANSISTORS;

EID: 33846055313     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2006.887517     Document Type: Article
Times cited : (15)

References (35)
  • 1
    • 0034739021 scopus 로고    scopus 로고
    • "Alternative dielectrics to silicon dioxide for memory and logic devices"
    • Aug
    • A. I. Kingon, J. P. Maria, and S. K. Streiffer, "Alternative dielectrics to silicon dioxide for memory and logic devices," Nature, vol. 406, no. 6799, pp. 1032-1038, Aug. 2000.
    • (2000) Nature , vol.406 , Issue.6799 , pp. 1032-1038
    • Kingon, A.I.1    Maria, J.P.2    Streiffer, S.K.3
  • 2
    • 0030291621 scopus 로고    scopus 로고
    • "Thermodynamic stability of binary oxides in contact with silicon"
    • Nov
    • K. J. Hubbard and D. G. Schlom, "Thermodynamic stability of binary oxides in contact with silicon," J. Mater. Res., vol. 11, no. 11, pp. 2757-2776, Nov. 1996.
    • (1996) J. Mater. Res. , vol.11 , Issue.11 , pp. 2757-2776
    • Hubbard, K.J.1    Schlom, D.G.2
  • 3
    • 0000214962 scopus 로고
    • "Chemical vapor deposition and characterization of HfO films from organo-hafnium compounds"
    • Mar
    • M. Balog, M. Schieber, M. Michman, and S. Patai, "Chemical vapor deposition and characterization of HfO films from organo-hafnium compounds," Thin Solid Films, vol. 41, no. 3, pp. 247-259, Mar. 1977.
    • (1977) Thin Solid Films , vol.41 , Issue.3 , pp. 247-259
    • Balog, M.1    Schieber, M.2    Michman, M.3    Patai, S.4
  • 5
    • 13444309342 scopus 로고    scopus 로고
    • "Charge trapping and breakdown mechanism in HfAlO/TaN gate stack analyzed using carrier separation"
    • Dec
    • W. Y. Loh, B. J. Cho, M. S. Joo, M. F. Li, D. S. H. Chan, S. Mathew, and D. L. Kwong, "Charge trapping and breakdown mechanism in HfAlO/TaN gate stack analyzed using carrier separation," IEEE Trans. Electron Devices, vol. 4, no. 4, pp. 696-703, Dec. 2004.
    • (2004) IEEE Trans. Electron Devices , vol.4 , Issue.4 , pp. 696-703
    • Loh, W.Y.1    Cho, B.J.2    Joo, M.S.3    Li, M.F.4    Chan, D.S.H.5    Mathew, S.6    Kwong, D.L.7
  • 6
    • 59949096250 scopus 로고    scopus 로고
    • "Relation between breakdown mode and breakdown location in short channel NMOSFETs and its impact on reliability specifications"
    • R. Degraeve, B. Kaczer, A. D. Keersgieter, and G. Groeseneken, "Relation between breakdown mode and breakdown location in short channel NMOSFETs and its impact on reliability specifications," in Proc. Int. Reliab. Phys. Symp. Tech. Dig., 2001, pp. 360-366.
    • (2001) Proc. Int. Reliab. Phys. Symp. Tech. Dig. , pp. 360-366
    • Degraeve, R.1    Kaczer, B.2    Keersgieter, A.D.3    Groeseneken, G.4
  • 8
    • 23344449696 scopus 로고    scopus 로고
    • "MOS RF reliability subject to dynamic voltage stress - Modeling and analysis"
    • Aug
    • C. Yu and J. S. Yuan, "MOS RF reliability subject to dynamic voltage stress - Modeling and analysis," IEEE Trans. Electron Devices, vol. 52, no. 8, pp. 1751-1758, Aug. 2005.
    • (2005) IEEE Trans. Electron Devices , vol.52 , Issue.8 , pp. 1751-1758
    • Yu, C.1    Yuan, J.S.2
  • 9
    • 3042557108 scopus 로고    scopus 로고
    • "Effect of gate-oxide breakdown on RF performance"
    • Sep
    • H. Yang, J. S. Yuan, Y. Liu, and E. Xiao, "Effect of gate-oxide breakdown on RF performance," IEEE Trans. Device Mater. Rel., vol. 3, no. 3, pp. 93-97, Sep. 2003.
    • (2003) IEEE Trans. Device Mater. Rel. , vol.3 , Issue.3 , pp. 93-97
    • Yang, H.1    Yuan, J.S.2    Liu, Y.3    Xiao, E.4
  • 10
    • 0038732515 scopus 로고    scopus 로고
    • "A model for gate-oxide breakdown in CMOS inverters"
    • Feb
    • R. Rodriguez, J. H. Stathis, and B. P. Linder, "A model for gate-oxide breakdown in CMOS inverters," IEEE Electron Device Lett., vol. 24, no. 2, pp. 114-116, Feb. 2003.
    • (2003) IEEE Electron Device Lett. , vol.24 , Issue.2 , pp. 114-116
    • Rodriguez, R.1    Stathis, J.H.2    Linder, B.P.3
  • 21
    • 84886447987 scopus 로고    scopus 로고
    • "RF MOSFET modeling accounting for distributed substrate and channel resistance with emphasis on the BSIM3v3 SPICE model"
    • W. Liu, R. Charpurey, M. C. Chang, U. Erdogan, R. Aggarwal, and J. P. Mattia, "RF MOSFET modeling accounting for distributed substrate and channel resistance with emphasis on the BSIM3v3 SPICE model," in IEDM Tech. Dig., 1997, pp. 309-312.
    • (1997) IEDM Tech. Dig. , pp. 309-312
    • Liu, W.1    Charpurey, R.2    Chang, M.C.3    Erdogan, U.4    Aggarwal, R.5    Mattia, J.P.6
  • 23
    • 0012854580 scopus 로고    scopus 로고
    • "Comparison of soft-breakdown triggers for large-area capacitors under constant voltage stress"
    • Sep
    • J. Schmitz, H. P. Tuinhout, H. J. Kretschmann, and R. H. Woerlee, "Comparison of soft-breakdown triggers for large-area capacitors under constant voltage stress," IEEE Trans. Device Mater. Rel., vol. 1, no. 3, pp. 150-157, Sep. 2001.
    • (2001) IEEE Trans. Device Mater. Rel. , vol.1 , Issue.3 , pp. 150-157
    • Schmitz, J.1    Tuinhout, H.P.2    Kretschmann, H.J.3    Woerlee, R.H.4
  • 24
    • 31744452012 scopus 로고    scopus 로고
    • "Statistics of competing post-breakdown failure modes in ultrathin MOS devices"
    • Feb
    • J. Sune, E. Y. Wu, and W. L. Lai, "Statistics of competing post-breakdown failure modes in ultrathin MOS devices," IEEE Trans. Electron Devices, vol. 53, no. 2, pp. 224-234, Feb. 2006.
    • (2006) IEEE Trans. Electron Devices , vol.53 , Issue.2 , pp. 224-234
    • Sune, J.1    Wu, E.Y.2    Lai, W.L.3
  • 25
  • 27
    • 10644270887 scopus 로고    scopus 로고
    • "Extending two-element capacitance extraction method toward ultraleaky gate oxides using a short-channel length"
    • Dec
    • J. S. Goo, T. M. Mantei, K. Wieczorek, W. G. En, and A. B. Icel, "Extending two-element capacitance extraction method toward ultraleaky gate oxides using a short-channel length," IEEE Electron Device Lett., vol. 25, no. 12, pp. 819-821, Dec. 2004.
    • (2004) IEEE Electron Device Lett. , vol.25 , Issue.12 , pp. 819-821
    • Goo, J.S.1    Mantei, T.M.2    Wieczorek, K.3    En, W.G.4    Icel, A.B.5
  • 28
    • 0033221855 scopus 로고    scopus 로고
    • "Accurate modeling and parameter extraction for MOS transistors valid up to 10 GHz"
    • Nov
    • S. Jen, C. C. Enz, D. R. Pehlke, M. Schröter, and B. J. Sheu, "Accurate modeling and parameter extraction for MOS transistors valid up to 10 GHz," IEEE Trans. Electron Devices, vol. 46, no. 11, pp. 2217-2227, Nov. 1999.
    • (1999) IEEE Trans. Electron Devices , vol.46 , Issue.11 , pp. 2217-2227
    • Jen, S.1    Enz, C.C.2    Pehlke, D.R.3    Schröter, M.4    Sheu, B.J.5
  • 32
    • 21644482313 scopus 로고    scopus 로고
    • "Charge trapping effects in HfSiON dielectrics on the ring oscillator circuit and the single stage inverter operation"
    • C. Y. Kang, R. Choi, J. H. Sim, C. Young, B. H. Lee, G. Bersuker, and J. C. Lee, "Charge trapping effects in HfSiON dielectrics on the ring oscillator circuit and the single stage inverter operation," in IEDM Tech. Dig., 2004, pp. 485-488.
    • (2004) IEDM Tech. Dig. , pp. 485-488
    • Kang, C.Y.1    Choi, R.2    Sim, J.H.3    Young, C.4    Lee, B.H.5    Bersuker, G.6    Lee, J.C.7
  • 34
    • 13444259568 scopus 로고    scopus 로고
    • "Impact of temperature-accelerated voltage stress on pMOS RF performance"
    • Dec
    • C. Yu, Y. Liu, A. Sadat, and J. S. Yuan, "Impact of temperature-accelerated voltage stress on pMOS RF performance," IEEE Trans. Device Mater. Rel., vol. 4, no. 4, pp. 664-669, Dec. 2004.
    • (2004) IEEE Trans. Device Mater. Rel. , vol.4 , Issue.4 , pp. 664-669
    • Yu, C.1    Liu, Y.2    Sadat, A.3    Yuan, J.S.4
  • 35
    • 4444281994 scopus 로고    scopus 로고
    • "SP: An advanced surface-potential-based compact MOSFET model"
    • Sep
    • G. Gildenblat, H.Wang, T. L. Chen, X. Gu, and X. Cai, "SP: An advanced surface-potential-based compact MOSFET model," IEEE J. Solid-State Circuits, vol. 39, no. 9, pp. 1394-1406, Sep. 2004.
    • (2004) IEEE J. Solid-State Circuits , vol.39 , Issue.9 , pp. 1394-1406
    • Gildenblat, G.1    Wang, H.2    Chen, T.L.3    Gu, X.4    Cai, X.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.