-
1
-
-
0141483968
-
-
Kluwer, New York, ISBN-0-306-47350-X
-
J. Orloff, M. Utlaut, L. Swanson, 'High resolution focus ion beams', Kluwer, New York, ISBN-0-306-47350-X, 2003.
-
(2003)
High Resolution Focus Ion Beams
-
-
Orloff, J.1
Utlaut, M.2
Swanson, L.3
-
2
-
-
84892224035
-
-
Springer Science+Business Media, Inc.
-
L.A. Giannuzi, F.A. Stevie, 'Introduction to focused ion beams (instrumentation, techniques, and practice)', Springer Science+Business Media, Inc., 2005.
-
(2005)
Introduction to Focused Ion Beams (Instrumentation, Techniques, and Practice)
-
-
Giannuzi, L.A.1
Stevie, F.A.2
-
3
-
-
33644922253
-
-
A.A. Tseng, Small 2005, 1, 924.
-
(2005)
Small
, vol.1
, pp. 924
-
-
Tseng, A.A.1
-
4
-
-
0036650136
-
-
R.M. Langford, A.K. Petford-Long, M. Rommeswinkle, S. Egelkamp, Mat. Sci. Techn. 2002, 18, 743.
-
(2002)
Mat. Sci. Techn.
, vol.18
, pp. 743
-
-
Langford, R.M.1
Petford-Long, A.K.2
Rommeswinkle, M.3
Egelkamp, S.4
-
6
-
-
13444257979
-
-
T. Ishitani, K. Umemura, T. Ohnishi, T. Yaguchi, T. Kamino, J. Elect. Microsc. 2004, 53, 443.
-
(2004)
J. Elect. Microsc.
, vol.53
, pp. 443
-
-
Ishitani, T.1
Umemura, K.2
Ohnishi, T.3
Yaguchi, T.4
Kamino, T.5
-
8
-
-
0042969119
-
-
J.C. Reiner, P. Gasser, U. Sennhauser, Microel. Reliability 2002, 42, 1753.
-
(2002)
Microel. Reliability
, vol.42
, pp. 1753
-
-
Reiner, J.C.1
Gasser, P.2
Sennhauser, U.3
-
9
-
-
20244363742
-
-
J. Gierak, E. Bourhis, M.N. Mérat Combes, Y. Chriqui, I. Sagnes, D. Mailly, P. Hawkes, R. Jede, L. Bruchhaus, L. Bardotti, B. Prével, A. Hannour, P. Mélinon, A. Perez, J. Ferré, J.-P. Jamet, A. Mougin, C. Chappert, V. Mathet, Microel. Eng. 2005, 78-79, 266.
-
(2005)
Microel. Eng.
, vol.78-79
, pp. 266
-
-
Gierak, J.1
Bourhis, E.2
Mérat Combes, M.N.3
Chriqui, Y.4
Sagnes, I.5
Mailly, D.6
Hawkes, P.7
Jede, R.8
Bruchhaus, L.9
Bardotti, L.10
Prével, B.11
Hannour, A.12
Mélinon, P.13
Perez, A.14
Ferré, J.15
Jamet, J.-P.16
Mougin, A.17
Chappert, C.18
Mathet, V.19
-
10
-
-
33646057402
-
-
P.M. Nellen, V. Callegari, R. Bronnimann, Microel. Eng. 2006, 83, 1805.
-
(2006)
Microel. Eng.
, vol.83
, pp. 1805
-
-
Nellen, P.M.1
Callegari, V.2
Bronnimann, R.3
-
11
-
-
20444470717
-
-
P.P. Jud, P.M. Nellen, U. Sennhauser, Adv. Eng. Mat. 2005, 7, 384.
-
(2005)
Adv. Eng. Mat.
, vol.7
, pp. 384
-
-
Jud, P.P.1
Nellen, P.M.2
Sennhauser, U.3
-
12
-
-
19744364811
-
-
R.J. Fasching, Y. Tao, F.B. Prinz, Sens. Act. B 2005, 108, 964.
-
(2005)
Sens. Act. B
, vol.108
, pp. 964
-
-
Fasching, R.J.1
Tao, Y.2
Prinz, F.B.3
-
13
-
-
32844471560
-
-
G. Villanuevaa, J.A. Plaza, A. Sanchez-Amores, J. Bausells, E. Martinez, J. Samitier, A. Errachid, Mat. Sci. Eng. 2006, C 26, 164.
-
(2006)
Mat. Sci. Eng.
, vol.C26
, pp. 164
-
-
Villanuevaa, G.1
Plaza, J.A.2
Sanchez-Amores, A.3
Bausells, J.4
Martinez, E.5
Samitier, J.6
Errachid, A.7
-
14
-
-
22144452597
-
-
C. Menozzi, G.C. Gazzadi, A. Alessandrini, P. Facci, Ultramicroscopy 2005, 104, 220.
-
(2005)
Ultramicroscopy
, vol.104
, pp. 220
-
-
Menozzi, C.1
Gazzadi, G.C.2
Alessandrini, A.3
Facci, P.4
-
15
-
-
23044440471
-
-
M.R. Koblischka, U. Hartmann, T. Sulzbach, J. Magnet. Magn. Mat. 2004, 272-276, 2138.
-
(2004)
J. Magnet. Magn. Mat.
, vol.272-276
, pp. 2138
-
-
Koblischka, M.R.1
Hartmann, U.2
Sulzbach, T.3
-
16
-
-
33646065980
-
-
R.J. Fasching, S.J. Bai, T. Fabian, F.B. Prinz, Microel. Eng. 2006, 83, 1638.
-
(2006)
Microel. Eng.
, vol.83
, pp. 1638
-
-
Fasching, R.J.1
Bai, S.J.2
Fabian, T.3
Prinz, F.B.4
-
17
-
-
19244383874
-
-
C. Lehrer, L. Frey, S. Petersen, T. Sulzbach, O. Ohlsson, T. Dziomba, H.U. Danzebrink, H. Ryssel, Microel. Eng. 2001, 57-58, 721.
-
(2001)
Microel. Eng.
, vol.57-58
, pp. 721
-
-
Lehrer, C.1
Frey, L.2
Petersen, S.3
Sulzbach, T.4
Ohlsson, O.5
Dziomba, T.6
Danzebrink, H.U.7
Ryssel, H.8
-
18
-
-
33646851226
-
-
A. Vila, F. Hernandez-Ramirez, J. Rodriguez, O. Casals, A. Romano-Rodriguez, J.R. Morante, M. Abid, Mat. Sci. Eng. 2006, C 26, 1063.
-
(2006)
Mat. Sci. Eng.
, vol.C26
, pp. 1063
-
-
Vila, A.1
Hernandez-Ramirez, F.2
Rodriguez, J.3
Casals, O.4
Romano-Rodriguez, A.5
Morante, J.R.6
Abid, M.7
-
19
-
-
24144461338
-
-
T.Y. Choi, D. Poulikakos, J. Tharian, U. Sennhauser, Appl. Phys. Lett. 2005, 87, 013108.
-
(2005)
Appl. Phys. Lett.
, vol.87
, pp. 013108
-
-
Choi, T.Y.1
Poulikakos, D.2
Tharian, J.3
Sennhauser, U.4
-
20
-
-
33646068391
-
-
P. Kitslaar, M. Strassner, I. Sagnes, E. Bourhis, X. Lafosse, C. Ulysse, C. David, R. Jede, L. Bruchhaus, J. Gierak, Microel. Eng. 2006, 83, 811.
-
(2006)
Microel. Eng.
, vol.83
, pp. 811
-
-
Kitslaar, P.1
Strassner, M.2
Sagnes, I.3
Bourhis, E.4
Lafosse, X.5
Ulysse, C.6
David, C.7
Jede, R.8
Bruchhaus, L.9
Gierak, J.10
-
22
-
-
0012334307
-
-
J.W. Ward, R.L. Kubena, M.W. Utlaut, J. Vac. Sci. Technol. 1988, B6, 2090.
-
(1988)
J. Vac. Sci. Technol.
, vol.B6
, pp. 2090
-
-
Ward, J.W.1
Kubena, R.L.2
Utlaut, M.W.3
-
23
-
-
33744808536
-
-
M. Marko, C. Hsieh, W. Moberlychan, C.A. Mannella, J. Frank, J. Microsc. 2006, 222, 42.
-
(2006)
J. Microsc.
, vol.222
, pp. 42
-
-
Marko, M.1
Hsieh, C.2
Moberlychan, W.3
Mannella, C.A.4
Frank, J.5
-
24
-
-
22844439317
-
-
D. Drobne, M. Milani, A. Zrimec, V. Leser, M. B. Zrimec, J. Microsc. 2005, 219, 29.
-
(2005)
J. Microsc.
, vol.219
, pp. 29
-
-
Drobne, D.1
Milani, M.2
Zrimec, A.3
Leser, V.4
Zrimec, M.B.5
-
25
-
-
0035840821
-
-
B.J. Inkson, M. Mulvihill, G. Mobus, Scripta Mater. 2001, 45, 753.
-
(2001)
Scripta Mater.
, vol.45
, pp. 753
-
-
Inkson, B.J.1
Mulvihill, M.2
Mobus, G.3
-
26
-
-
0036472634
-
-
D.N. Dunn, G.J. Shiflet, R. Hull, Rev. Sci. Instr. 2002, 73, 330.
-
(2002)
Rev. Sci. Instr.
, vol.73
, pp. 330
-
-
Dunn, D.N.1
Shiflet, G.J.2
Hull, R.3
-
27
-
-
0000923306
-
-
M.H.F. Overwijk, F.C. Vandenheuvel, C.W.T. Bullelieuwma, J. Vac. Sci. Technol. 1993, B 11, 2021.
-
(1993)
J. Vac. Sci. Technol.
, vol.B11
, pp. 2021
-
-
Overwijk, M.H.F.1
Vandenheuvel, F.C.2
Bullelieuwma, C.W.T.3
-
29
-
-
33745027439
-
-
J. Li, T. Malis, S. Dionne, Mat. Charact. 2006, 57, 64.
-
(2006)
Mat. Charact.
, vol.57
, pp. 64
-
-
Li, J.1
Malis, T.2
Dionne, S.3
-
30
-
-
0038266633
-
-
B.I. Prenitzer, C.A. Urbanik-Shannon, L.A. Giannuzzi, S.R. Brown, R.B. Irwin, T.L. Shofner, F.A. Stevie, Microsc. Microanal. 2003, 9, 216.
-
(2003)
Microsc. Microanal.
, vol.9
, pp. 216
-
-
Prenitzer, B.I.1
Urbanik-Shannon, C.A.2
Giannuzzi, L.A.3
Brown, S.R.4
Irwin, R.B.5
Shofner, T.L.6
Stevie, F.A.7
-
31
-
-
18644379509
-
-
A. Lugstein, B. Basnar, G. Hobler, E. Bertagnolli, J. Appl. Phys. 2002, 92, 4037.
-
(2002)
J. Appl. Phys.
, vol.92
, pp. 4037
-
-
Lugstein, A.1
Basnar, B.2
Hobler, G.3
Bertagnolli, E.4
-
32
-
-
0345711496
-
-
A. Barna, B. Pecz, M. Menyhard, Micron 1999, 30, 267.
-
(1999)
Micron
, vol.30
, pp. 267
-
-
Barna, A.1
Pecz, B.2
Menyhard, M.3
-
33
-
-
4544365184
-
-
J. Reiner, P.M. Nellen, U. Sennhauser, Microel. Reliability 2004, 44, 1583.
-
(2004)
Microel. Reliability
, vol.44
, pp. 1583
-
-
Reiner, J.1
Nellen, P.M.2
Sennhauser, U.3
-
34
-
-
33646055495
-
-
E. Platzgummer, A. Biedermann, H. Langfischer, S. Eder-Kapl, M. Kuemmel, S. Cernusca, H. Loeschner, C. Lehrer, L. Frey, A. Lugstein, E. Bertagnolli, Microel. Eng. 2006, 83, 936.
-
(2006)
Microel. Eng.
, vol.83
, pp. 936
-
-
Platzgummer, E.1
Biedermann, A.2
Langfischer, H.3
Eder-Kapl, S.4
Kuemmel, M.5
Cernusca, S.6
Loeschner, H.7
Lehrer, C.8
Frey, L.9
Lugstein, A.10
Bertagnolli, E.11
-
36
-
-
33645522160
-
-
P.P. Jud, G. Grossmann, U. Sennhauser, P.J. Uggowitzer, Adv. Eng. Mat. 2006, 8, 179.
-
(2006)
Adv. Eng. Mat.
, vol.8
, pp. 179
-
-
Jud, P.P.1
Grossmann, G.2
Sennhauser, U.3
Uggowitzer, P.J.4
-
37
-
-
33644969673
-
-
S. Rast, U. Gysin, P. Ruff, C. Gerber, E. Meyer, D.W. Lee, Nanotech. 2006, 17, S189.
-
(2006)
Nanotech.
, vol.17
-
-
Rast, S.1
Gysin, U.2
Ruff, P.3
Gerber, C.4
Meyer, E.5
Lee, D.W.6
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