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Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 5, 2001, Pages 2186-2193

Preparation of transmission electron microscopy cross-section specimens using focused ion beam milling

(2) Langford, R M a Petford Long, A K a

a UNIVERSITY OF OXFORD (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

COMMINUTION; ION BEAM ASSISTED DEPOSITION; REACTIVE ION ETCHING; TRANSMISSION ELECTRON MICROSCOPY;

BROAD ION BEAM (BIB) THINNING; FOCUSED ION BEAMS (FIB); GAS ASSISTED ETCHING (GAE);

SPECIMEN PREPARATION;

EID: 0035441752 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1378072 Document Type: Article

Times cited : (253)

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