Micromachining by Focused Ion Beam (FIB) for materials characterization

Advanced Engineering Materials

Volumn 7, Issue 5, 2005, Pages 384-388

  Jud, Pascal P ^a   Nellen, Philipp M ^a   Sennhauser, Urs ^a  

^a SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; ENERGY DISPERSIVE SPECTROSCOPY; ETCHING; MICROMACHINING; MICROSTRUCTURE; NEAR FIELD SCANNING OPTICAL MICROSCOPY; ORGANOMETALLICS; SCANNING ELECTRON MICROSCOPY; SHEAR DEFORMATION; SOLDERING; STRESS CONCENTRATION; TRANSMISSION ELECTRON MICROSCOPY;

FATIGUE BEHAVIOR; FOCUSED ION BEAM (FIB) TECHNOLOGY; LEAD-FREE SOLDERS; MATERIALS CHARACTERIZATION;

ION BEAMS;

EID: 20444470717     PISSN: 14381656     EISSN: None     Source Type: Journal    
DOI: 10.1002/adem.200500048     Document Type: Article

References (9)

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