Fabrication of metallic contacts to nanometre-sized materials using a focused ion beam (FIB)

Materials Science and Engineering C

Volumn 26, Issue 5-7, 2006, Pages 1063-1066

  Vila A ^a   Hernandez Ramirez F ^a   Rodriguez J ^a   Casals, O ^a   Romano Rodriguez A ^a   Morante, J R ^a   Abid, M ^b  

^a UNIVERSITY OF BARCELONA   (Spain)

^b EPFL   (Switzerland)

Author keywords

Focused ion beam (FIB); Nanocontacts

Indexed keywords

ELECTRON BEAMS; ELECTRONIC EQUIPMENT; ION BEAMS; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; SCANNING ELECTRON MICROSCOPY;

ELECTRICAL PROPERTIES; FOCUSED ION BEAM (FIB); METALLIC CONTACTS; NANOCONTACTS; NANOWIRES;

MOS DEVICES;

EID: 33646851226     PISSN: 09284931     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.msec.2005.09.092     Document Type: Article

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