Partially fluorinated, polyhedral oligomeric silsesquioxane-functionalized (meth)acrylate resists for 193 nm bilayer lithography

Chemistry of Materials

Volumn 18, Issue 17, 2006, Pages 4040-4048

  Douvas, Antonios M ^a   Van Roey, Frieda ^b   Goethals, Mieke ^b   Papadokostaki, Kyriaki G ^c   Yannakopoulou, Konstantina ^c   Niakoula, Dimitra ^a   Gogolides, Evangelos ^a   Argitis, Panagiotis ^a  

^a INSTITUTE OF MICROELECTRONICS   (Greece)

^b IMEC   (Belgium)

^c INSTITUTE OF NANOSCIENCE AND NANOTECHNOLOGY   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

ACRYLICS; ADHESION; COMPOSITION; LITHOGRAPHY; TERPOLYMERIZATION;

FLUORINATED MATERIALS; HOMOGENEITY; PHOTOACID GENERATOR (PAG); POLYHEDRAL OLIGOMERIC SILSESQUIOXANE (POSS);

PHOTORESISTS;

EID: 33748567756     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm0605522     Document Type: Article

References (46)

1. Reichmanis, E.; Nalamsu, U.; Houlihan, F. M. Acc. Chem. Res. 1999, 32, 659.
2. Wallraff, G. M.; Hinsberg, W. D. Chem. Rev. 1999, 99, 1801.
3. Ito, H. Proc. SPIE-Int. Soc. Opt. Eng. 1999, 3678, 2.
4. Argitis, P. Encycl. Nanosci. Nanotechnol. 2004, 9, 339.
5. Rothschild, M.; Bloomstein, T. M.; Kunz, R. R.; Liberman, V.; Switkes, M.; Palamacci, S. T.; Sedlacek, J. H. C.; Hardy, D.; Grenville, A. J. Vac. Sci. Technol., B 2004, 22, 2877.
6. Yamashita, T.; Ishikawa, T.; Yoshida, T.; Hayamai, T.; Araki, T.; Aoyama, H.; Hagiwara, T.; Itani, Z.; Fujii, Z. J. Photopolym. Sci. Technol. 2005, 18, 631.
7. Gabor, A. H.; Pruette, L. C.; Ober, C. K. Chem. Mater. 1996, 8, 2282.
8. Hien, S.; Angood, S.; Ashworth, D.; Basset, S.; Bloomstein, T.; Dean, K.; Kunz, R. R.; Miller, D.; Patel, S.; Rich, G. Proc. SPIE-Int. Soc. Opt. Eng. 2001, 4345, 439.
9. Gogolides, E.; Argitis, P.; Couladouros, E. A.; Vidali, V. P.; Vasilopoulou, M.; Cordoyiannis, G.; Diakoumakos, C. D.; Tserepi, A. J. Vac. Sci. Technol., B 2003, 21, 141.
10. Houlihan, F. M.; Wallow, T. I.; Nalamasu, O.; Reichmanis, E. Macromolecules 1997, 30, 6517.
11. Okoroanyanwu, U.; Shimokawa, T.; Byers, J.; Willson, C. G. Chem. Mater. 1998, 10, 3319.
12. Maeda, K.; Nakano, K.; Iwasa, S.; Hasegawa, E. Jpn. J. Appl. Phys. 2001, 40, 7162.
13. Bates, A. K.; Rothschild, M.; Bloomstein, T. M.; Fedynyshyn, T. H.; Kunz, R. R.; Liberman, V.; Switkes, M. IBM J. Res. Dev. 2001, 45, 605.
14. Kunz, R. R.; Bloomstein, T. M.; Hardy, D. E.; Goodman, R. B.; Downs, D. K.; Curtin, J. E. Proc. SPIE-Int. Soc. Opt. Eng. 1999, 3678, 13.
15. Kishimura, S.; Katsuyama, A.; Sasago, M.; Shirai, M.; Tsunooka, M. Jpn. J. Appl. Phys. 1999, 38, 7103.
16. Bae, Y. C.; Douki, K.; Yu, T.; Dai, J.; Schmaljohann, D.; Koerner, H.; Ober, C. K.; Conley, W. Chem. Mater. 2002, 14, 1306.
17. Ito, H.; Wallraff, G. M.; Fender, N.; Brock, P.; Hinsberg, W. D.; Mahorowala, A.; Larson, C. E.; Truong, H. D.; Breyta, G.; Allen, R. D. J. Vac. Sci. Technol., B 2001, 19, 2678.
18. Tran, H. V.; Hung, R. J.; Chiba, T.; Yamada, S.; Mrozek, T.; Hsieh, Y.-T.; Chambers, C. R.; Osborn, B. P.; Trinque, B. C.; Pinnow, M. J.; MacDonald, S. A.; Willson, C. G.; Sanders, D. P.; Connor, E. F.; Grubbs, R. H.; Conley, W. Macromolecules 2002, 35, 6539.
19. Sanders, D. P.; Connor, E. F.; Grubbs, R. H.; Hung, R. J.; Osborn, B. P.; Chiba, T.; MacDonald, S. A.; Willson, C. G.; Conley, W. Macromolecules 2003, 36, 1534.
20. Sooriyakumaran, R.; Fenzel-Alexander, D.; Fender, N.; Wallraff, G. M.; Allen, R. D. Proc. SPIE-Int. Soc. Opt. Eng. 2001, 4345, 319.
21. Cefalas, A. C.; Sarantopoulou, E.; Gogolides, E.; Argitis, P. Microelectron. Eng. 2000, 53, 123.
22. Fedynyshyn, T. H.; Kunz, R. R.; Sinta, R. F.; Goodman, R. B.; Doran, S. P. J. Vac. Sci. Technol., B 2000, 18, 3332.
23. Li, G.; Wang, L.; Ni, H.; Piittman, C. U. J. J. Inorg. Organomet. Polym. 2001, 11, 123.
24. Wu, H.; Hu, Y.; Gonsalves, K. E.; Yacaman, M. J. J. Vac. Sci. Technol., B 2001, 19, 851.
25. Gonsalves, K. E.; Merhari, L.; Wu, H.; Hu, Y. Adv. Mater. 2001, 13, 703.
26. (a) Ganesan, R.; Choi, J.-H.; Yun, H.-J.; Kwon, Y.-G.; Kim, K.-S.; Oh, T.-H.; Kim, J.-B. Proc. SPIE-Int. Soc. Opt. Eng. 2005, 5753, 671.
27. (b) Ito, H.; Truong, H. D.; Burns, S. D.; Pfeiffer, D.; Huang, W.-S.; Khojasteh, M. M.; Varanasi, P. R.; Lerce, M. Proc. SPIE-Int. Soc. Opt. Eng. 2005, 5753, 109.
28. Sooriyakumaran, R.; Truong, H.; Sundberg, L.; Morris, M.; Hinsberg, B.; Ito, H.; Allen, R.; Huang, W.-S.; Goldfarb, D.; Burns, S.; Pfeiffer, D. Proc. SPIE-Int. Soc. Opt. Eng. 2005, 5753, 329.
29. Koh, K.; Sugiyama, S.; Morinaga, T.; Ohno, K.; Tsujii, Y.; Fukuda, T.; Yamahiro, M.; Iijima, T.; Oikawa, H.; Watanabe, K.; Miyashita, T. Macromolecules 2005, 38, 1264.
30. Turri, S.; Levi, M. Macromol. Rapid Commun. 2005, 26, 1233.
31. Bellas, V.; Tegou, E.; Raptis, I.; Gogolides, E.; Argitis, P.; Iatrou, H.; Chadjichristidis, N.; Sarantopoulou, E.; Cefalas, A. C. J. Vac. Sci. Technol., B 2002, 20, 2902.
32. Tegou, E.; Bellas, V.; Gogolides, E.; Argitis, P.; Dean, K.; Eon, D.; Cartry, G.; Cardinaud, C. Proc. SPIE-Int. Soc. Opt. Eng. 2003, 5039, 453.
33. Tegou, E.; Bellas, V.; Gogolides, E.; Argitis, P.; Eon, D.; Cartry, G.; Cardinaud, C. Chem. Mater. 2004, 16, 2567.
34. Gogolides, E.; Argitis, P.; Tegou, E.; Bellas, V. International Patent Application, PCT/GR03/0018/2003-02472, 2003.
35. Tegou, E.; Bellas, V.; Gogolides, E.; Argitis, P. Microelectron. Eng. 2004, 73-74, 238.
36. Simon, S. L. Thermochim. Acta 2001, 374, 55.
37. Diakoumakos, C. D.; Raptis, I. Polymer 2003, 44, 251.
38. Niakoula, D.; Raptis, I.; Goustouridis, D.; Argitis, P. Jpn. J. Appl. Phys. 2004, 44, 5247.
39. Vourdas, N.; Karadimos, G.; Gogolides, E.; Boudouvis, A. G.; Raptis, I. Evaluation of optical methods for the glass transition temperature measurement of thin polymeric films. Presented at 4th Int. Conf. Instrumental Methods of Analysis, Iraklion, Greece, Oct 2005.
40. Vourdas, N.; Bellas, V.; Tegou, E.; Brani, O.; Constantoudis, V.; Argitis, P.; Tserepi, A.; Gogolides, E.; Eon, D.; Cartry, G.; Cardinaud, C. In Plasma Processes and Polymers; d'Agostino, R., Favia, P., Oehr, C., Wertheimer, M. R., Eds.; Wiley-VCH: Weinheim, 2005; p 281.
41. Zheng, L.; Waddon, A. J.; Farris, R. J.; Coughlin, B. E. Macromolecules 2002, 35, 2375.
42. Lichtenhan, J. D.; Otonari, Y. A.; Carr, M. J. Macromolecules 1995, 28, 8435.
43. Haddad, T. S.; Lichtenhan, J. D. Macromolecules 1996, 29, 7302.
44. Ibrahim, K.; Starck, P.; Löfgren, B.; Seppälä, J. J. Polym. Sci., Part A: Polym. Chem. 2005, 43, 5049.
45. De Kesel, C.; Lefèvre, C.; Nagy, J. B.; David, C. Polymer 1999, 40, 1969.
46. March, J. Advanced Organic Chemistry: Reactions, Mechanisms and Structures, 4th ed.; Wiley-Interscience: New York, 1992; p 250.