Growth of fluorocarbon polymer thin films with high CF2 fractions and low dangling bond concentrations by thermal chemical vapor deposition

Applied Physics Letters

Volumn 68, Issue 20, 1996, Pages 2810-2812

  Limb, Scott J ^a   Labelle, Catherine B ^a   Gleason, Karen K ^a   Edell, David J ^b   Gleason, Edward F ^c  

^a Massachusetts Institute of Technology   (United States)

^b HARVARD UNIVERSITY   (United States)

^c MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000975001     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116332     Document Type: Article

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