Nanopatterning with UV optical lithography

MRS Bulletin

Volumn 30, Issue 12, 2005, Pages 942-946

  Rothschild, M ^a   Bloomstein, T M ^a   Efremow Jr , N ^a   Fedynyshyn, T H ^a   Fritze, M ^a   Pottebaum, I ^a   Switkes, M ^a  

^a NONE

Author keywords

Nanoscale; Optical lithography

Indexed keywords

GEOMETRY; LITHOGRAPHY; MICROELECTRONICS; NANOTECHNOLOGY; SEMICONDUCTOR MATERIALS; ULTRAVIOLET RADIATION;

NANOBIOLOGY; NANOPHOTONICS; NANOSCALE; SEMICONDUCTOR ELECTRONICS;

NANOSTRUCTURED MATERIALS;

EID: 33744810063     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/mrs2005.247     Document Type: Article

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