A 157nm immersion microstepper

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5754, Issue PART 1, 2005, Pages 237-242

  Switkes, M ^a   Bloomstein, T M ^a   Rothschild, M ^a   Arriola, E W ^b   Morrison, T H ^b  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b NEWPORT CORPORATION   (United States)

Author keywords

157nm; Immersion lithography; Microstepper

Indexed keywords

157NM; IMMERSION LITHOGRAQPHY; MICROSTREPPERS;

ACTUATORS; IMAGING SYSTEMS; INTERFEROMETERS; LENSES; REAL TIME SYSTEMS;

PHOTOLITHOGRAPHY;

EID: 25144510868     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.602585     Document Type: Conference Paper

References (14)

1. B. J. Lin, J. Microlith., Microfab., Microsyst. 1, 7 (2002).
2. J. Mulkens, D. Flagello, B. Streefkerk, and P. Graeupner, J. Microlith., Microfab., Microsyst. 3, 104 (2004).
3. S. Owa and H. Nagasaka, J. Microlith., Microfab., Microsyst. 3, 97 (2004).
4. J. H. Burnett and S. G. Kaplan, Journal of Microlithography, Microfabrication, and Microsystems, (2004).
5. R. Gupta, J. H. Burnett, U. Griesmann, and M. Walhout, Appl. Optics 37, 5964 (1998).
6. M. Switkes, M. Rothschild, R. R. Kunz, R. F. Sinta, P. M. Gallagher-Wetmore, V. J. Krukonis, and K. Williams, Proc. SPIE 5040, 690 (2003).
7. K. Ronse, P. De Bisschop, A. M. Goethals, J. Hermans, R. Jonckheere, S. Light, U. Okoroanyanwu, R. Watso, D. McAfferty, J. Ivaldi, T. Oneil, and H. Sewell, Microelectron. Eng. 73-74, 5 (2004).
8. J. H. Burnett, R. Gupta, U. Griesmann, and T. E. Jou, Proc. SPIE 3679, 1146 (1999).
9. R. R. Kunz, M. Switkes, R. F. Sinta, J. E. Curtin, R. H. French, R. C. Wheland, C.-P. Chai Kao, M. P. Mawn, L. Lin, P. M. Wetmore, V. J. Krukonis, and K. Williams, J. Microlith., Microfab., Microsyst. 3, 73 (2004).
10. M. Switkes and M. Rothschild, J. Vac. Sci. Technol. B 19, 2353 (2001).
11. E. W. Arriola, Proc. SPIE 5176, 36 (2003).
12. J. H. Burnett, Z. H. Levine, and E. L. Shirley, Phys. Rev. B 64, 241102 (2001).
13. T. H. Fedynyshyn, R. R. Kunz, S. P. Doran, M. L. Lind, and J. E. Curtin, Proc. SPIE 3999, 335 (2000).
14. M. I. Sanchez, W. D. Hinsberg, F. A. Houle, J. A. Hoffnagle, H. Ito, and C. Nguyen, Proc. SPIE 3678, 160 (1999).