Improvements in CaF2 material properties for next-generation microlithography applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5377, Issue PART 3, 2004, Pages 1735-1739

  Kohli, Jeffrey T ^a   Li, Qiao ^a   Rosch, William R ^a  

^a Sullivan Park ^*  (United States)

Author keywords

Birefringence; Calcium fluoride; Crystal defects; Dislocations; Homogeneity; Mosaic; Slip

Indexed keywords

ANNEALING; BIREFRINGENCE; CRYSTAL DEFECTS; CRYSTAL STRUCTURE; DATA REDUCTION; DISLOCATIONS (CRYSTALS); IMAGE QUALITY; LENSES; LITHOGRAPHY; RAYLEIGH SCATTERING; STOICHIOMETRY; STRESSES;

CALCIUM FLUORIDE; HOMOGENEITY; MOSAIC; SLIP;

CALCIUM COMPOUNDS;

EID: 3843107872     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.534578     Document Type: Conference Paper

References (4)

1. 2," Journal of Mat. Sci. Vol. 29, 1994, 6207-6211.
2. W. Sherry, J. Van der Sande, "TEM Investigation of the plastic deformation behaviour of calcium fluoride," Philosophical Magazine A, Vol. 40 (1), 1979, 77-95.
3. K. Nassau, The Physics and Chemistry of Color, John Wiley & Sons, New York, 1983.
4. 2 lens blanks for state of the art lithography tools," Optical Microlihography XVI, Anthony Yen Editor, Proceedings of SPIE, Vol. 5040, 2003, 734-74.