High NA lithographic imagery at Brewster's angle

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4691, Issue 1, 2002, Pages 1-10

  Brunner, Timothy A ^a   Seong, Nakgeuon ^a   Hinsberg, William D ^b   Hoffnagle, John A ^b   Houle, Frances A ^b   Sanchez, Martha I ^b  

^a IBM   (United States)

^b IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

High NA imagery; High NA optics; High resolution lithography; Holographic lithography; Interferometric lithography; Lithography; Microlithography; Polarization; Swing curve

Indexed keywords

COMPUTER SIMULATION; ELECTROMAGNETIC WAVE DIFFRACTION; HOLOGRAPHY; IMAGING TECHNIQUES; INTERFEROMETRY; LIGHT POLARIZATION; REFRACTIVE INDEX;

INTERFEROMETRIC LITHOGRAPHY;

LITHOGRAPHY;

EID: 0036416070     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.474473     Document Type: Article

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