Lithography with 157 nm lasers

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 6, 1997, Pages 2112-2116

  Bloomstein, T M ^a   Horn, M W ^a   Rothschild, M ^a   Kunz, R R ^a   Palmacci, S T ^a   Goodman, R B ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 4143150811     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589230     Document Type: Article

References (12)

1. D. Henderson, J. C. White, H. G. Craighead, and I. Adesida, Appl. Phys. Lett. 46, 900 (1985).
2. H. G. Craighead, J. C. White, R. E. Howard, L. D. Jackel, R. E. Behringer, J. E. Sweeney, and R. W. Epworth, J. Vac. Sci. Technol. B 1, 1186 (1983).
3. J. C. White, H. G. Craighead, R. E. Howard, L. D. Jackel, R. E. Behringer, R. W. Epworth, D. Henderson, and J. E. Sweeney, Appl. Phys. Lett. 44, 22 (1984).
4. V. N. Ishchenko, S. A. Kochubei, and A. M. Razhev, Sov. Tech. Phys. Lett. 12, 66 (1986).
5. S. C. Palmateer, R. R. Kunz, A. R. Forte, and M. Rothschild, Proc. SPIE 2438, 455 (1995).
6. H. Okabe, Photochemistry of Small Molecules (Wiley, New York, 1978).
7. H. H. Li, J. Phys. Chem. Ref. Data 9, 161 (1980).
8. I. H. Malitson, J. Opt. Soc. Am. 55, 1205 (1965).
9. R. N. Shagam (dn/dT at 193 nm), unpublished results.
10. D. N. Batchelder and R. O. Simmons, J. Chem. Phys. 41, 2324 (1964).
11. Y. S. Touloukian, R. K. Kirby, R. E. Taylor, and T. Y. R. Lee, Thermal Expansion, Nonmetallic Solids (IFI Plenum, New York, 1977).
12. Y. S. Touloukian, R. W. Powell, C. Y. Ho, and P. G. Klemens, Thermal Conductivity, Nonmetallic Solids (IFI Plenum, New York, 1970).