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Volumn 14, Issue 2, 2005, Pages 35-39

An update on low-k dielectrics

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL TREATMENTS; INTERNATIONAL TECHNOLOGY FOR SEMICONDUCTORS (ITRS); MOLECULAR PROPERTIES; RESISTANCE CAPACITANCE (RC);

EID: 23244467486     PISSN: 10648208     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Review
Times cited : (11)

References (47)
  • 1
    • 84860974494 scopus 로고    scopus 로고
    • http://public.itrs.net/


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.