Organosilicate Spin-on Glasses: I. Effect of Chemical Modification on Mechanical Properties

Journal of the Electrochemical Society

Volumn 151, Issue 3, 2004, Pages

  Kim, Suhan ^a   Toivola, Yvete ^b   Cook, Robert F ^b   Char, Kookheon ^a   Chu, Sang Hyun ^c   Lee, Jin Kyu ^a   Yoon, Do Y ^a   Rhee, Hee Woo ^d  

^a Seoul National University   (South Korea)

^b UNIVERSITY OF MINNESOTA   (United States)

^c NASA LANGLEY RESEARCH CENTER   (United States)

^d Sogang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; COPOLYMERS; CRACKING (CHEMICAL); ELLIPSOMETRY; INDENTATION; INFRARED SPECTROSCOPY; PERMITTIVITY; PLASMAS; SCANNING ELECTRON MICROSCOPY; SILICATES; STRAIN; SURFACE TREATMENT;

MICROELECTRONIC INTERCONNECTION; SPIN-ON GLASSES;

GLASS;

EID: 1842425504     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1643072     Document Type: Article

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