Surface modified spin-on xerogel films as interlayer dielectrics

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 1, 1999, Pages 205-212

  Nitta, S V ^a   Pisupatti, V ^a   Jain, A ^a   Wayner Jr , P C ^a   Gill, W N ^a   Plawsky, J L ^a  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000345105     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590541     Document Type: Article

References (21)

1. C. J. Brinker and G. W. Scherer, Sol-Gel Science (Academic, New York, 1990).
2. S. S. Prakash, C. J. Brinker, and A. J. Hurd, J. Non-Cryst. Solids 190, 264 (1995).
3. S. S. Prakash, C. J. Brinker, A. J. Hurd, and S. M. Rao, Nature (London) 374, 439 (1995).
4. C. Jin, J. D. Lutimer, D. M. Smith, and A. T. Ramos, MRS Bull. 39 (1997).
5. L. H. Hrubesh and J. F. Poco, J. Non-Cryst. Solids 188, 46 (1995).
6. S. Maekawa, K. Okude, and T. Ohishi, Electron. Commun. Jpn., Part 2: Electron. 77, 86 (1994).
7. X. Zhongfu and P. Gunther, IEEE Trans. Electr. Insul. 1, 31 (1994).
8. K. Vorotilov et al., J. Sol-Gel Sci. Technol. 5, 173 (1995).
9. D. M. Smith, J. Anderson, C.-C. Cho, and B. E. Gnade, Mater. Res. Soc. Symp. Proc. 371, 261 (1995).
10. C. C. Cho, D. M. Smith, and J. Anderson, Mater. Chem. Phys. 42, 91 (1995).
11. R. S. List, C. Jin, S. W. Russell, S. Yamanaka, L. Olsen, L. Le, L. M. Ting, and R. H. Havemann, Symposium on VLSI Technology Digest of Technical Papers, 1997, pp. 77-79.
12. E. M. Zielinski, S. W. Russell, R. S. List, A. M. Wilson, C. Jin, K. J. Newton, J. P. Lu, T. Hurd, W. Y. Hsu, V. Cordasco, M. Gopikanth, V. Korthuis, W. Lee, G. Cerny, N. M. Russell, P. B. Smith, S. O'Brien, and R. H. Havemann, Proc. IEDM 1997, 31.7.1 (1997).
13. M.-H. Jo, J.-K. Hong, H.-H. Park, J.-J. Kim, and S.-H. Hyun, Microelectron. Eng. 33, 343 (1997).
14. M.-H. Jo, H.-H. Park, D.-J. Kim, S.-H. Hyun, S.-Y. Choi, and J.-T. Paik, J. Appl. Phys. 82, 1299 (1997).
15. M.-H. Jo, J.-K. Hong, H.-H. Park, J.-J. Kirn, S.-H. Hyun, and S.-Y. Choi, Thin Solid Films 308, 490 (1997).
16. S. Henning and L. Svensson, Phys. Scr. 23, 697 (1981).
17. H. G. Tompkins, A Users Guide to Ellipsometry (Academic, New York, 1993).
18. L. W. Hrubesh, L. E. Keene, and V. R. Lattorre, J. Mater. Res. 8, 1736 (1993).
19. L. Chow, T. Yu, B. S. Dunn, K. N. Tu, and C. Chiang, Mater. Res. Soc. Symp. Proc. 476, 105 (1997).
20. T. M. Parrill, J. Mater. Res. 7, 2230 (1992).
21. R. M. Almeida and C. G. Pantano, J. Appl. Phys. 68, 4225 (1990).