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Volumn 21, Issue 6, 2003, Pages 2590-2598

Water-in-carbon dioxide microemulsions for removing post-etch residues from patterned porous low-k dielectrics

Author keywords

[No Author keywords available]

Indexed keywords

CARBON DIOXIDE; DETERGENTS; DIELECTRIC MATERIALS; DISSOLUTION; ELECTRIC INSULATORS; ELLIPSOMETRY; ETCHING; POROUS MATERIALS; PRESSURIZATION; REFRACTIVE INDEX; SPECTROSCOPIC ANALYSIS; SUPERCRITICAL FLUIDS; SURFACE PROPERTIES; SURFACE TENSION; THICKNESS MEASUREMENT; TRANSPORT PROPERTIES;

EID: 0942267214     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1624268     Document Type: Article
Times cited : (39)

References (35)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.