Deep sub-micron gate diamond MISFETs

Diamond and Related Materials

Volumn 12, Issue 10-11, 2003, Pages 1814-1818

  Matsudaira, Hiroki ^a,b   Takuya, Arima ^a,b   Umezawa, Hitoshi ^a,b   Miyamoto, Shingo ^a,b   Ishizaka, Hiroaki ^a,b   Tachiki, Minoru ^a,b   Kawarada, Hiroshi ^a,b  

^a WASEDA UNIVERSITY   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

Diamond MISFETs; Sub micron gate; Transconductance

Indexed keywords

FABRICATION; MISFET DEVICES; TRANSCONDUCTANCE;

THIN GATE INSULATORS;

DIAMONDS;

DIAMOND;

EID: 0346119976     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(03)00273-5     Document Type: Article

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