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Volumn 343-344, Issue 1-2, 1999, Pages 623-626
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The effect of hydrogen on the electronic properties of CVD diamond films
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Author keywords
Chemical vapor deposition; CVD diamond film; Hydrogen; Surface conductivity
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Indexed keywords
ANNEALING;
CARRIER CONCENTRATION;
CARRIER MOBILITY;
CHEMICAL VAPOR DEPOSITION;
CURRENT VOLTAGE CHARACTERISTICS;
ELECTRIC CONDUCTIVITY OF SOLIDS;
ELECTRONIC PROPERTIES;
HYDROGEN;
POLYCRYSTALLINE MATERIALS;
SCHOTTKY BARRIER DIODES;
SEMICONDUCTING DIAMONDS;
SEMICONDUCTING FILMS;
HALL CARRIER MOBILITY;
DIAMOND FILMS;
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EID: 0032624431
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(99)00119-4 Document Type: Article |
Times cited : (26)
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References (13)
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