Native oxide technology for III-V optoelectronic devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 10292, Issue , 1998, Pages 141-183

  Deppe, Dennis G ^a   Huffaker, Diana L ^a  

^a The University of Texas at Austin   (United States)

Author keywords

Compound semiconductors; Field effect transistors; Native oxides; Optoelectronic devices; VCSELs

Indexed keywords

LASER MATERIALS PROCESSING; LASER PULSES; LASERS; OPTOELECTRONIC DEVICES; SEMICONDUCTOR LASERS; SURFACE EMITTING LASERS; TRANSCEIVERS; TRANSISTORS;

COMPOUND SEMICONDUCTORS; DEVICE FABRICATIONS; EDGE EMITTING LASER DIODE; III-V OPTOELECTRONICS; NATIVE OXIDES; NOVEL DEVICES; STEAM OXIDATION;

FIELD EFFECT TRANSISTORS;

EID: 1642412689     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.300617     Document Type: Conference Paper

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