Steam oxidation of GaAs

Electronics Letters

Volumn 32, Issue 21, 1996, Pages 2024-2026

  Oh, T H ^a   Huffaker, D L ^a   Graham, L A ^a   Deng, H ^a   Deppe, D G ^a  

^a The University of Texas at Austin   (United States)

Author keywords

Gallium arsenide; Oxidation

Indexed keywords

CHARACTERIZATION; INTERFACES (MATERIALS); OXIDATION; OXIDES; SEMICONDUCTOR DEVICE MANUFACTURE; SILICA; STEAM; SUBSTRATES;

NATIVE OXIDE; STEAM OXIDATION; VOLUME CONTRACTION;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 0030261681     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:19961315     Document Type: Article

References (8)

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