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Volumn 44, Issue 2, 1997, Pages 214-225

Low Dit, thermodynamically stable Ga2O3-GaAs interfaces: fabrication, characterization, and modeling

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE CARRIERS; DEPOSITION; ELECTRONIC PROPERTIES; FABRICATION; HETEROJUNCTIONS; INTERFACES (MATERIALS); MODELS; MOLECULAR BEAM EPITAXY; MOLECULES; PHOTOLUMINESCENCE; SEMICONDUCTING GALLIUM COMPOUNDS; THERMODYNAMIC STABILITY;

EID: 0031075990     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.557709     Document Type: Article
Times cited : (171)

References (32)
  • 4
    • 0030127542 scopus 로고    scopus 로고
    • CMOS device and interconnect technology enhancements for low-power/low-voltage applications
    • vol. 39, pp. 481-488, 1996.
    • P. K. Vasudev, "CMOS device and interconnect technology enhancements for low-power/low-voltage applications," Solid-State Electron., vol. 39, pp. 481-488, 1996.
    • Solid-State Electron.
    • Vasudev, P.K.1
  • 5
    • 0030126519 scopus 로고    scopus 로고
    • Complementary heterostructure FET technology for low-power, high-speed digital applications
    • vol. 39, pp. 461-469, 1996.
    • D. E. Fulkerson, S. Baier, J. Nohava, and R. Hochhalter, "Complementary heterostructure FET technology for low-power, high-speed digital applications," Solid-State Electron., vol. 39, pp. 461-469, 1996.
    • Solid-State Electron.
    • Fulkerson, D.E.1    Baier, S.2    Nohava, J.3    Hochhalter, R.4
  • 7
    • 0025469356 scopus 로고    scopus 로고
    • Analysis of propagation delays in high-speed VLSI circuits using a distributed line model
    • vol. 9, pp. 821-826, Aug. 1990.
    • M. Passlack, M. Uhle, and H. Elschner, "Analysis of propagation delays in high-speed VLSI circuits using a distributed line model," IEEE Trans. Computer-Aided Design, vol. 9, pp. 821-826, Aug. 1990.
    • IEEE Trans. Computer-Aided Design
    • Passlack, M.1    Uhle, M.2    Elschner, H.3
  • 9
    • 0020750368 scopus 로고    scopus 로고
    • Analysis of native oxide films and oxide-substrate reactions on III-V semiconductors using thermochemical phase diagrams
    • vol. 103, pp. 3-16, 1983.
    • G. P. Schwartz, "Analysis of native oxide films and oxide-substrate reactions on III-V semiconductors using thermochemical phase diagrams," Thin Solid Films, vol. 103, pp. 3-16, 1983.
    • Thin Solid Films
    • Schwartz, G.P.1
  • 11
    • 0019613258 scopus 로고    scopus 로고
    • GaAs metallization: Some problems and trends
    • vol. 19, pp. 794-798, 1981.
    • J. M. Woodall and J. L. Freeouf, "GaAs metallization: Some problems and trends," J. Vac. Sci. Technol., vol. 19, pp. 794-798, 1981.
    • J. Vac. Sci. Technol.
    • Woodall, J.M.1    Freeouf, J.L.2
  • 12
    • 0030377120 scopus 로고    scopus 로고
    • Low interface state density oxide-GaAs structures fabricated by in situ molecular beam epitaxy
    • 1996, vol. 421 (Compound Semiconductor Electronics and Photonics).
    • M. Passlack and M. Hong, "Low interface state density oxide-GaAs structures fabricated by in situ molecular beam epitaxy," in Proc. MRS Spring Mtg., Materials Research Society, San Francisco, CA, 1996, vol. 421 (Compound Semiconductor Electronics and Photonics).
    • Proc. MRS Spring Mtg., Materials Research Society, San Francisco, CA
    • Passlack, M.1    Hong, M.2
  • 13
    • 0029308904 scopus 로고    scopus 로고
    • New frontiers of molecular beam epitaxy with in situ processing
    • vol. 150, pp. 277-284, 1995.
    • M. Hong, "New frontiers of molecular beam epitaxy with in situ processing," J. Cryst. Growth, vol. 150, pp. 277-284, 1995.
    • J. Cryst. Growth
    • Hong, M.1
  • 14
    • 21544442158 scopus 로고    scopus 로고
    • Surface studies on clean and oxygen exposed GaAs and Ge surfaces by low-energy electron loss spectroscopy
    • vol. 5, p. 259, 1975.
    • R. Ludeke and A. Koma, "Surface studies on clean and oxygen exposed GaAs and Ge surfaces by low-energy electron loss spectroscopy," CRC Crit. Rev. Solid-State Sci., vol. 5, p. 259, 1975.
    • CRC Crit. Rev. Solid-State Sci.
    • Ludeke, R.1    Koma, A.2
  • 16
    • 0042925173 scopus 로고    scopus 로고
    • Dissociation process and crystal growth of gadolinium gallium garnet
    • vol. 46, pp. 483-486, 1979.
    • W. Piekarczyk and A. Pajaczkowska, "Dissociation process and crystal growth of gadolinium gallium garnet," J. Cryst. Growth, vol. 46, pp. 483-486, 1979.
    • J. Cryst. Growth
    • Piekarczyk, W.1    Pajaczkowska, A.2
  • 20
    • 0026401803 scopus 로고    scopus 로고
    • Calculations of electron inelastic mean free paths
    • vol. 17, pp. 927-939, 1991.
    • S. Tanuma, C. J. Powell, and D. R. Pen, "Calculations of electron inelastic mean free paths," Surf. Interface Anal., vol. 17, pp. 927-939, 1991.
    • Surf. Interface Anal.
    • Tanuma, S.1    Powell, C.J.2    Pen, D.R.3
  • 21
    • 0018506777 scopus 로고    scopus 로고
    • Quantitative chemical depth profiles of anodic oxide on GaAs obtained by X-ray photoelectron spectroscopy
    • vol. 126, pp. 1370-1374, 1979.
    • Y. Mizokawa, H. Iwasaki, R. Nishitani, and S. Nakamura, "Quantitative chemical depth profiles of anodic oxide on GaAs obtained by X-ray photoelectron spectroscopy," J. Electrochem. Soc.: Solid-State Sci. Technol., vol. 126, pp. 1370-1374, 1979.
    • J. Electrochem. Soc.: Solid-State Sci. Technol.
    • Mizokawa, Y.1    Iwasaki, H.2    Nishitani, R.3    Nakamura, S.4
  • 24
    • 0020180840 scopus 로고    scopus 로고
    • Numerical analysis of heterostructure semiconductor devices
    • 30, pp. 1151-1159, Sept. 1983.
    • M. S. Lundstrom and R. J. Schuelke, "Numerical analysis of heterostructure semiconductor devices," IEEE Trans. Electron Devices, vol. ED30, pp. 1151-1159, Sept. 1983.
    • IEEE Trans. Electron Devices, Vol. ED
    • Lundstrom, M.S.1    Schuelke, R.J.2
  • 31
    • 0029375525 scopus 로고    scopus 로고
    • 0.67 as quantum wells grown by molecular beam epitaxy on (100) and (311) GaAs substrates
    • vol. 67, pp. 1885-1887, 1995.
    • 0.67 As quantum wells grown by molecular beam epitaxy on (100) and (311) GaAs substrates," Appl. Phys. Lett., vol. 67, pp. 1885-1887, 1995.
    • Appl. Phys. Lett.
    • Brandt, O.1    Kanamoto, K.2    Gotoda, M.3    Isu, T.4    Tsukada, N.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.