Fabrication issues of oxide-confined VCSELs

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3003, Issue , 1997, Pages 69-74

  Geib, Kent M ^a   Choquette, Kent D ^a   Hou, Hong Q ^a   Hammons, B E ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; CAVITY RESONATORS; FABRICATION; GAS DYNAMICS; OXIDES; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING FILMS;

OXIDE CONFINEMENT; THERMAL OXIDATION; VERTICAL-CAVITY SURFACE-EMITTING LASERS;

SEMICONDUCTOR LASERS;

EID: 0031373538     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)