Heating effects on the Young's modulus of films sputtered onto micromachined resonators

Materials Research Society Symposium - Proceedings

Volumn 518, Issue , 1998, Pages 33-38

  Kahn, H ^a   Huff, M A ^a   Heuer, A H ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; ELECTRIC FIELD EFFECTS; MELTING; MICROMACHINING; PHASE TRANSITIONS; SEMICONDUCTING SILICON; SPUTTER DEPOSITION; TEMPERATURE; THERMAL EFFECTS;

MICROMACHINED RESONATORS; RESONANCE TESTING; STRESS EFFECTS;

CRYSTAL RESONATORS;

EID: 0032292917     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-518-33     Document Type: Conference Paper

References (12)