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Journal of Materials Research

Volumn 16, Issue 8, 2001, Pages 2223-2228

Size effect on the mechanical properties of microfabricated polysilicon thin films

(3) Ding, J N a Meng, Y G a Wen, S Z a

a TSINGHUA UNIVERSITY (China)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELASTIC MODULI; FRACTURE TOUGHNESS; POLYSILICON; STATISTICAL METHODS; TENSILE STRENGTH; TENSILE TESTING; WEIBULL DISTRIBUTION;

MAGNETIC-SOLENOID FORCE ACTUATORS;

THIN FILMS;

EID: 0035436252 PISSN: 08842914 EISSN: None Source Type: Journal
DOI: 10.1557/JMR.2001.0305 Document Type: Article

Times cited : (20)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.