Fracture testing of silicon microcantilever beams

Journal of Applied Physics

Volumn 79, Issue 5, 1996, Pages 2386-2393

  Wilson, C J ^a   Ormeggi, A ^a   Narbutovskih, M ^a  

^a HEWLETT PACKARD LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000195904     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.361102     Document Type: Article

References (16)

1. C. P. Chen and M. H. Leipold, Am. Ceram. Soc. Bull. 59, 469 (1980).
2. M. J. Kaufman and A. J. Forty, J. Mater. Sci. 21, 3167 (1986).
3. F. Ericson, S. Johansson, and J. Schweitz, Mater. Sci. Eng. A 105/106, 131 (1980).
4. F. Pourahmadi, P. Barth, and K. Petersen, Sensors Actuators A 21-23, 850 (1990).
5. F. Pourahmadi, D. Gee, and K. Petersen, International Conference on Solid State Sensors and Actuators, Digest of Technical Papers (IEEE, New York. 1991), p. 197.
6. S. Johansson, J. Schweitz, L. Tenerz, and J. Tiren, J. Appl. Phys. 63, 4799 (1988).
7. F. Ericson and J. Schweitz, J. Appl. Phys. 68, 5840 (1990).
8. W. Brantley, J. Appl. Phys. 44, 534 (1973).
9. J. Wortman and R. Evans, J. Appl. Phys. 36, 153 (1965).
10. ABAQUS User's Manual, Version 5.2, Hibbit (Karlsson and Sorensen, Inc., Providence, RI, 1992).
11. J. M. Matusz, W. J. O'Donnell, and R. J. Erdlac, J. Eng. Indust. 90, 607 (1969).
12. S. Wolfram, Mathematica, 2nd ed., The Advanced Book Program (Addison Wesley, Redwood City, CA, 1991).
13. D. Clarke, Semiconductors and Semimetals 37, 79 (1992).
14. M. Marks, The International J. Microcirc. Electron. Packag. 16, 350 (1993).
15. Y. L. Tsai, Int. J. Fracture 57, 167 (1992).
16. S. Johansson, Acta Universitatis Upsaliensis, Doctoral Dissertation at Uppsala University, 1988.