Properties of heteroepitaxial 3C-SiC films grown by LPCVD

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 2, Issue , 1995, Pages 190-193

  Yamaguchi, Yoh ichi ^a   Nagasawa, Hiroyuki ^a   Shoki, Tsutomu ^a   Annaka, Norimichi ^a  

^a HOYA Healthcare Corporation   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; CHEMICAL VAPOR DEPOSITION; ELASTIC MODULI; EPITAXIAL GROWTH; FILTERS (FOR FLUIDS); MEMBRANES; POLYCRYSTALLINE MATERIALS; PRESSURE EFFECTS; ROTARY PUMPS; SILICON WAFERS; SINGLE CRYSTALS; TRANSPARENCY;

LOW PRESSURE CHEMICAL VAPOR DEPOSITION; MASS FLOW CONTROLLER; MECHANICAL BOOSTER PUMP; PIRANI GAUGE; POLYCRYSTALLINE FILM; POLYMEMBRANE;

SILICON CARBIDE;

EID: 0029517982     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)