Mechanical properties of different Polysilicons

ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

Volumn 2000-AB, Issue , 2000, Pages 255-259

  Sharpe, W N ^a   Jackson, K ^a   Coles, G ^a   LaVan, D A ^b  

^a Johns Hopkins University   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; POLYCRYSTALLINE MATERIALS; STRENGTH OF MATERIALS;

MODULUS VALUES; SANDIA NATIONAL LABORATORIES; YOUNG MODULUS;

POLYSILICON;

EID: 0345063571     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2000-1100     Document Type: Conference Paper

References (5)

1. J. Koskinen, E.S., R. Soave, and H.H. Johnson, Microtensile Testing of Free-Standing Polysilicon Fibers of Various Grain Sizes. Journal of Micromechanics and Microengineering, 1993(35), pp. 13-17.
2. M. Biebl and H. V. Philipsborn, Fracture Strength of Doped and Undoped Polysilicon in Transducers '95 - Eurosensors IX Proceedings of the 8th International Conference on Solid-State Sensors and Actuators, 1995, Stockholm, Sweden, pp. 72-75.
3. M. Biebl, G. Brandl, and R. T. Howe, Young's Modulus of In Situ Phosphorus - Doped Polysilicon in Transducers '95 - Eurosensors DC Proceedings of the 8th International Conference on Solid-State Sensors and Actuators, 1995, Stockholm, Sweden, pp. 80-83.
4. Tsuchiya, T., Sakata, J., and Taga, Y. Tensile Strength and Fracture Toughness of Surface Micromachined Polycrystalline Silicon Thin Films Prepared under Various Conditions in Thin-Films; Stresses and Mechanical Properties VII, 1998, Boston, MA, pp. 285-290.
5. Sharpe, W.N., Jr., Turner, K. T., and Edwards, R. L., Tensile Testing of Polysilicon. Experimental Mechanics, 1999(39), pp. 162-170.