High-cycle fatigue of single-crystal silicon thin films

Journal of Microelectromechanical Systems

Volumn 10, Issue 4, 2001, Pages 593-600

  Muhlstein, Christopher L ^a   Brown, Stuart B ^b   Ritchie, Robert O ^a  

^a Lawrence Berkeley National Laboratory   (United States)

^b EXPONENT INC   (United States)

Author keywords

Fatigue failure; MEMS devices; Single crystal silicon; Thin films

Indexed keywords

ATMOSPHERIC HUMIDITY; CANTILEVER BEAMS; FATIGUE TESTING; FRACTURE; SILICON; SINGLE CRYSTALS; STRESSES;

SILICON THIN FILMS;

THIN FILMS;

EID: 0035624942     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.967383     Document Type: Article

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