Visible electroluminescence from MOS capacitors with Si-implanted SiO2

IEICE Transactions on Electronics

Volumn E85-C, Issue 11, 2002, Pages 1895-1904

  Matsuda, Toshihiro ^a   Kawabe, Masaharu ^a   Iwata, Hideyuki ^a   Ohzone, Takashi ^a  

^a TOYAMA PREFECTURAL UNIVERSITY   (Japan)

Author keywords

Electrolurainescence; MOS capacitor; Si implantation; SiO2

Indexed keywords

FREQUENCIES; ION IMPLANTATION; MOS CAPACITORS; POLYSILICON; SILICA;

MICRODISPLAYS;

ELECTROLUMINESCENCE;

EID: 0036881889     PISSN: 09168524     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

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