Blue photoluminescence from Si-doped amorphous silica films by RF sputtering

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 35, Issue 5 SUPPL. A, 1996, Pages 2694-2697

  Yoshida, Satoshi ^a,b   Hanada, Teiichi ^a   Tanabe, Setsuhisa ^a   Soga, Naohiro ^a  

^a KYOTO UNIVERSITY   (Japan)

^b UNIVERSITY OF SHIGA PREFECTURE   (Japan)

Author keywords

Amorphous silica film; Blue photoluminescence; Sputtering

Indexed keywords

ANNEALING; GLASS; OPTICAL PROPERTIES; PHOTOLUMINESCENCE; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING; SILICA; SPECTRUM ANALYSIS; SPUTTERING; TEMPERATURE;

AMORPHOUS SILICA FILMS; ANNEALING TEMPERATURE; BLUE PHOTOLUMINESCENCE; PHOTOLUMINESCENCE EXCITATION SPECTRA;

AMORPHOUS FILMS;

EID: 0030149021     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.2694     Document Type: Article

References (18)

1. L. T. Canham: Appl. Phys. Lett. 57 (1990) 1046.
2. R. P. Vasques, R. W. Fathaner, T. George, A. Ksendzov and T. L. Lin: Appl. Phys. Lett. 60 (1992) 1004.
3. T. Konishi, T. Yao, M. Tajima, H. Ohshima, H. Ito and T. Hattori: Jpn. J. Appl. Phys. 31 (1992) 1216.
4. M. Kondo: J. Non-Cryst. Solids 164-166 (1993) 941.
5. Y. Suda, T. Ban, T. Koizumi, H. Koyama, T. Tezuka, S. Shin and N. Koshida: Jpn. J. Appl. Phys. 33 (1994) 581.
6. Y. Kanemitsu, T. Ogawa, K. Shiraishi and K. Takeda: Phys. Rev. B 48 (1993) 4883.
7. M. K. Lee and K. R. Peng: Appl. Phys. Lett. 62 (1993) 3159.
8. H. Mimura, T. Futagi, T. Matsumoto, T. Nakamura and Y. Kanemitsu: Jpn. J. Appl. Phys. 33 (1994) 586.
9. L. Tsybeskov, Ju. V. Vandyshev and P. M. Fauchet: Phys. Rev. B 49 (1994) 7821.
10. A. G. Cullis, L. T. Canham, G. M. Williams, P. W. Smith and O. D. Dosser: J. Appl. Phys. 75 (1994) 493.
11. K. Takeda and K. Shiraishi: Solid State Commun. 85 (1993) 301.
12. L. N. Skuja, A. N. Streletsky and A. B. Pakovich: Solid State Commun. 85 (1984) 1069.
13. J. H. Stathis and M. A. Kastner: Phys. Rev. B 35 (1987) 2972.
14. T. Kanashima, R. Nagayoshi, M. Okuyama and Y. Hamakawa: J. Appl. Phys. 74 (1993) 5742.
15. Y. Osaka, K. Tsunetomo, F. Toyomura, H. Myoren and K. Kohno: Jpn. J. Appl. Phys. 31 (1992) L365.
16. S. Hayashi, T. Nagareda, Y. Kanzawa and K. Yamamoto: Jpn. J. Appl. Phys. 32 (1993) 3840.
17. J. P. Mitchell and D. G. Denure: Solid-State Electron. 16 (1973) 825.
18. Y. Kanemitsu, K. Suzuki, Y. Masumoto, T. Komatsu, K. Sato, S. Kyushin and H. Matsumoto: Solid State Commun. 86 (1993) 545.