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Japanese Journal of Applied Physics, Part 2: Letters

Volumn 36, Issue 8 PART A, 1997, Pages

Visible luminescence induced by Si-Ion implantation into Si single crystals covered with a thin SiO2 layer

(3) Lan, Aidong a Liu, Baixin a Bai, Xinde a

a TSINGHUA UNIVERSITY (China)

Author keywords

Ion implantation; Photoluminescence; Si based luminescent materials; Silicon; SiO2

Indexed keywords

ANNEALING; HIGH TEMPERATURE EFFECTS; ION IMPLANTATION; PHOTOLUMINESCENCE; SILICA; SINGLE CRYSTALS; THIN FILMS;

LUMINESCENT MATERIALS;

SEMICONDUCTING SILICON;

EID: 0031198256 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.36.l1019 Document Type: Article

Times cited : (7)

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