Visible electroluminescence from MOS capacitors with Si-implanted SiO2 under dynamic operation

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 2001, Pages 167-170

  Matsuda, T ^a   Takata, H ^a   Kawabe, M ^a   Ohzone, T ^a  

^a TOYAMA PREFECTURAL UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COLOR; ELECTROLUMINESCENCE; ION IMPLANTATION; LIGHT EMISSION; MATHEMATICAL MODELS; POLYSILICON; SEMICONDUCTING SILICON; SILICA; SPECTRUM ANALYSIS;

ELECTROLUMINESCENCE COLOR; SILICON IMPLANTED SILICA;

MOS CAPACITORS;

EID: 0035714778     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)