메뉴 건너뛰기




Volumn 18, Issue 3, 2000, Pages 1262-1267

Process damage assessment of a low energy inductively coupled plasma-based neutral source

Author keywords

[No Author keywords available]

Indexed keywords

PHOTONS; RADIATION DAMAGE; ULTRAVIOLET RADIATION;

EID: 0034187458     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591372     Document Type: Article
Times cited : (9)

References (55)
  • 8
    • 0343266053 scopus 로고    scopus 로고
    • K. Nauka, J. Theil, and J. Lagowski, in Ref. 5, p. 127
    • K. Nauka, J. Theil, and J. Lagowski, in Ref. 5, p. 127.
  • 9
    • 0343266052 scopus 로고    scopus 로고
    • K. Pangal and J. C. Sturm, in Ref. 5, p. 203
    • K. Pangal and J. C. Sturm, in Ref. 5, p. 203.
  • 18
    • 0342396420 scopus 로고    scopus 로고
    • V. Vahedi, N. Benjamin, and A. Perry, in Ref. 5, p. 41
    • V. Vahedi, N. Benjamin, and A. Perry, in Ref. 5, p. 41.
  • 25
    • 0343701703 scopus 로고    scopus 로고
    • S. Savas, in Ref. 21, p. 127
    • S. Savas, in Ref. 21, p. 127.
  • 36
    • 0342396400 scopus 로고    scopus 로고
    • Ph.D. thesis, The College of William and Mary, Williamsburg, VA
    • C. A. Nichols, Ph.D. thesis, The College of William and Mary, Williamsburg, VA, 1996.
    • (1996)
    • Nichols, C.A.1
  • 38
    • 0342396398 scopus 로고    scopus 로고
    • M. J. Goecker, T. K. Bennett, Jaeyoung Park, Z. Wang, and S. A. Cohen, in Ref. 5, p. 175
    • M. J. Goecker, T. K. Bennett, Jaeyoung Park, Z. Wang, and S. A. Cohen, in Ref. 5, p. 175.
  • 42
    • 0342831151 scopus 로고
    • Ph.D. thesis, Princeton University, Princeton, NJ
    • J. W. Cutherbertson, Ph.D. thesis, Princeton University, Princeton, NJ, 1991.
    • (1991)
    • Cutherbertson, J.W.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.