Process-induced damage by a low energy neutral beam source

International Symposium on Plasma Process-Induced Damage, P2ID, Proceedings

Volumn , Issue , 1999, Pages 116-119

  Tang, Xianmin ^a   Wang, Qi ^a   Manos, Dennis M ^a  

^a Dept of Economics and Thomas Jefferson Program in Public Policy at the College of William and Mary   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION; GASES; LIGHT REFLECTION; PHOTONS; PHOTORESISTS; POLYMETHYL METHACRYLATES; RADIATION DAMAGE; SURFACE CLEANING;

LOW ENERGY NEUTRAL BEAM SOURCE; PLASMA INDUCED DAMAGE; SURFACE REFLECTION NEUTRALIZATION METHOD;

PLASMA SOURCES;

EID: 0033340201     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (10)