Plasma process induced surface damage removal

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 1, 1998, Pages 260-264

  Brooks, C B ^a   Buie, M J ^a   Vaidya, K J ^a  

^a APPLIED MATERIALS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032344714     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580980     Document Type: Article

References (11)

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