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Volumn 2, Issue , 1997, Pages 875-878
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Bulk micromachined silicon angular rate sensor
a a a a a a a
a
VTI Hamlin OY
(Finland)
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Author keywords
[No Author keywords available]
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Indexed keywords
DEGREES OF FREEDOM (MECHANICS);
ELECTRODES;
MICROMACHINING;
NATURAL FREQUENCIES;
ROTATION;
SEMICONDUCTING SILICON;
ANGULAR RATE SENSOR;
AUTOMOTIVE CONTROL SYSTEM;
BULK MICROMACHINING;
CORIOLIS FORCE;
SILICON SENSORS;
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EID: 0030648205
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (22)
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References (10)
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