Micromachining inertial instruments

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2879, Issue , 1996, Pages 26-36

  Weinberg, Marc S ^a   Bernstein, Jonathan ^a   Borenstein, Jeffrey T ^a   Campbell, J ^a   Cousens, J ^a   Cunningham, Robert K ^a   Fields, R ^a   Greiff, Paul ^a   Hugh, B ^a   Niles, Les ^a   Sohn, Jerome B ^a  

^a CHARLES STARK DRAPER LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

APPLICATION SPECIFIC INTEGRATED CIRCUITS; DRAPER GYROSCOPES; INERTIAL INSTRUMENTS; SILICON WAFERS;

ACCELEROMETERS; ACOUSTIC DEVICES; BONDING; GYROSCOPES; INTEGRATED CIRCUITS; MICROELECTROMECHANICAL DEVICES; PERFORMANCE; SEMICONDUCTING SILICON; SENSORS;

MICROMACHINING;

EID: 0030384697     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (17)