Electronics for micromachined inertial sensors

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 1169-1172

  Boser, Bernhard E ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ACTUATORS; CAPACITORS; GYROSCOPES; INTEGRATED CIRCUITS; SPURIOUS SIGNAL NOISE;

CAPACITIVE INTERFACE CIRCUITS; MICROMACHINED INERTIAL SENSOR; RESONANT FORCE SENSORS;

SENSORS;

EID: 0030710895     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (28)