A HIGH SENSITIVITY Z-AXIS TORSIONAL SILICON ACCELEROMETER

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 1996, Pages 765-768

  Selvakumar, Arjun ^a   Ayazi, Farrokh ^a   Najdi, Khalil ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; SILICON WAFERS; BANDWIDTH; CAPACITANCE; ELECTRODES; FABRICATION; MICROMACHINING; NATURAL FREQUENCIES; READOUT SYSTEMS; SILICON SENSORS; VOLTAGE MEASUREMENT;

AIR-GAPS; CAPACITIVE ACCELEROMETERS; COMB FINGERS; DISSOLVED WAFER PROCESS; HIGH ASPECT RATIO; HIGH SENSITIVITY; MICRO-MACHINED; PULL-IN-VOLTAGE; SILICON ACCELEROMETERS; SUSPENSION BEAMS;

ASPECT RATIO; ACCELEROMETERS;

DISSOLVED WAFER PROCESS; INTERDIGITATED ELECTRODES; SILICON ACCELEROMETERS; VARYING OVERLAP AREA METHOD;

EID: 0030388077     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.1996.554092     Document Type: Conference Paper

References (8)

1. [l] W. C. Tang, “Digitalcapacitive accelerometer”,U.SPatent# 5,353,641, October 11, 1994.
2. Y. Gianchandani and K. Najaf, “A bulk silicon dissolved wafer ...‘I, Journal of MicroElectroMechanicalSystems, June 1992,pp. 77-85.
3. Timoshenko, Elements of strength of materials, 5th-4, Van Nostrand ReinholdCompany, 1968,pp. 234-5.
4. R. J. Roark,Formulas for stress and strain, 4tl-ed, McGraw-Hill Book Company, 1965 p. 195.
5. A Selvakumar, W. H. Juan, S. Pang and K. Najafi, “Vertical comb array microactuators”, Proc. IEEE Micro ElectroMechanical Systems,Amsterdam,The Netherlands, 1995,pp. 43-8.
6. ”191-8.
7. L. C. Spangler and C. J. Kemp”ISAAC-Integrated Silicon ...,Digest, Transducers Stockholm, Sweden, June 1995,pp. 585-8.
8. [SI N. Yazdi, A. Mason, K. Najafi and K. D. Wise, “A low power generic interface circuit for capacitive sensors”, Digest, Solid State Sensors and Actuators Workshop, Hilton Head, SC, June ‘96, pp. 215-8.