Design and fabrication of a high-performance polysilicon vibrating ring gyroscope

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 621-626

  Ayazi, Farrokh ^a   Najafi, Khalil ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; DRY ETCHING; MICROELECTRODES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NUMERICAL ANALYSIS; SENSORS;

POLYSILICON RING GYROSCOPES; TRENCH REFILL FABRICATION METHOD; YAW RATE SENSORS;

GYROSCOPES;

EID: 0031654025     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)