Micromachined tunneling accelerometer with a low-voltage CMOS interface circuit

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 1213-1216

  Yeh, Chingwen ^a   Najafi, Khalil ^a  

^a Input Output Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; CURRENT VOLTAGE CHARACTERISTICS; ELECTRON TUNNELING; MICROMACHINING; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE MODELS; SEMICONDUCTOR DEVICE STRUCTURES; SIGNAL PROCESSING;

CURRENT TO VOLTAGE CONVERTER; ELECTROMECHANICAL MODEL; INTERFACE CIRCUIT; MICROMACHINED TUNNELING ACCELEROMETER;

ACCELEROMETERS;

EID: 0030705573     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)