Laterally oscillated and force-balanced micro vibratory rate gyroscope supported by fish hook shape springs

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1997, Pages 494-499

  Park, K Y ^a   Lee, C W ^a   Oh, Y S ^a   Cho, Y H ^a  

^a Samsung Electro Mechanics   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; DYNAMIC RESPONSE; FORCE CONTROL; NATURAL FREQUENCIES; OSCILLATIONS; SEMICONDUCTOR DEVICE STRUCTURES; SPRINGS (COMPONENTS); VIBRATIONS (MECHANICAL);

ELECTROMECHANICAL STABILITY; FISH HOOK SHAPE SPRINGS; FORCE BALANCING ELECTRODES; POLYSILICON STRUCTURES;

GYROSCOPES;

EID: 0030706502     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)