Surface-micromachined resonant accelerometer

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 859-862

  Roessig, Trey A ^a   Howe, Roger T ^a   Pisano, Albert P ^a   Smith, James H ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMACHINING; OSCILLATORS (ELECTRONIC); RESONANCE; RESONATORS; SENSORS; STICTION;

ALLAN VARIANCE; DOUBLE ENDED TUNING FORK RESONATOR; MICROPHOTOGRAPH; RESONANT ACCELEROMETER; SURFACE MICROMACHINING;

ACCELEROMETERS;

EID: 0030648206     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)