New silicon rate gyroscope

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 615-620

  Geiger, W ^a   Folkmer, B ^a   Merz, J ^a   Sandmaier, H ^a   Lang, W ^a  

^a Hahn Schickard Gesellschaft   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; COST EFFECTIVENESS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SENSITIVITY ANALYSIS; SENSORS;

ANGULAR RATE SENSORS; SILICON RATE GYROSCOPES;

GYROSCOPES;

EID: 0031677957     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)