Pure CMOS surface micromachined integrated accelerometer

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 174-179

  Hierold, Christofer ^a   Hildebrandt, Andreas ^a   Naeher, Ulrich ^a   Scheiter, Thomas ^a   Mensching, Bernd ^a   Steger, Max ^a   Tielert, Reinhard ^a  

^a SIEMENS AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION MEASUREMENT; CAPACITANCE; CMOS INTEGRATED CIRCUITS; ETCHING; MICROMACHINING; PHOTOLITHOGRAPHY; SEMICONDUCTING SILICON COMPOUNDS; SENSORS;

POLYSILICON; PURE CMOS SURFACE MICROMACHINED INTEGRATED ACCELEROMETER; SEISMIC MASS;

ACCELEROMETERS;

EID: 0029732308     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)