Low power, wide range threshold acceleration sensing system

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 186-191

  Selvakumar, A ^a   Nazdi, N ^a   Najafi, K ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION; BANDWIDTH; CMOS INTEGRATED CIRCUITS; MULTICHIP MODULES; SEMICONDUCTING GLASS; SEMICONDUCTOR DEVICE MANUFACTURE; SENSORS; SILICON WAFERS; SUBSTRATES; SWITCHES;

ACCELERATION DETECTION SYSTEM; LOW POWER INTERFACE CIRCUIT; SENSOR SYSTEM;

ACCELEROMETERS;

EID: 0029732662     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)