Surface micromachined accelerometers

IEEE Journal of Solid-State Circuits

Volumn 31, Issue 3, 1996, Pages 366-375

  Boser, Bernhard E ^b,c,d,e,f   Howe, Roger T ^{a,b,f,g,h,i,j}  

^a IEEE

^b UNIVERSITY OF CALIFORNIA   (United States)

^c ETH ZURICH   (Switzerland)

^d STANFORD UNIVERSITY   (United States)

^e LUCENT TECHNOLOGIES   (United States)

^f UNIVERSITY OF CALIFORNIA   (United States)

^g HARVEY MUDD COLLEGE   (United States)

^h CARNEGIE MELLON UNIVERSITY   (United States)

ⁱ MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^j Solid State Sensor Actuator W   (United States)

more..

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; CMOS INTEGRATED CIRCUITS; MICROMACHINING; MOS DEVICES; PERFORMANCE; SENSORS; SPURIOUS SIGNAL NOISE; THIN FILM DEVICES;

ELECTROSTATIC FORCE FEEDBACK; POSITION SENSING INTERFACE CIRCUITS; SURFACE MICROMACHINING; THIN FILM MICROMECHANICAL STRUCTURES; VOLTAGE PULSES;

MICROELECTROMECHANICAL DEVICES;

EID: 0030110593     PISSN: 00189200     EISSN: None     Source Type: Journal    
DOI: 10.1109/4.494198     Document Type: Article

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