Analysis of a highly sensitive silicon gyroscope with cantilever beam as vibrating mass

Sensors and Actuators, A: Physical

Volumn 54, Issue 1-3, 1996, Pages 568-573

  Maenaka, K ^a   Fujita, T ^a   Konishi, Y ^a   Maeda, M ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

Angular rate sensors; Bulk micromachining; Gyroscopes; Resonant sensors; Silicon micromachining

Indexed keywords

EID: 0000616811     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80016-7     Document Type: Article

References (10)

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