A new miniaturized surface micromachined tunneling accelerometer

IEEE Electron Device Letters

Volumn 17, Issue 6, 1996, Pages 306-308

  Kubena, R L ^a   Atkinson, G M ^a   Robinson, W P ^a   Stratton, F P ^a  

^a Hughes Aircraft Co   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; ELECTRODES; ELECTROSTATICS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES; SILICON WAFERS; SPURIOUS SIGNAL NOISE;

ELECTROSTATIC DEFLECTION ELECTRODES; LOW NOISE AUTOMATIC SERVOCONTROL CIRCUITS; PIEZOELECTRIC DISPLACEMENT TRANSDUCERS; PIEZORESISTIVE DISPLACEMENT TRANSDUCERS; SURFACE MICROMACHINED TUNNELING;

ACCELEROMETERS;

EID: 0030172320     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.496466     Document Type: Article

References (8)

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